Table of Contents

Jpn. J. Appl. Phys. Vol.37(1998)
Part 1, No. 10, 15 October 1998


Invited Review Paper

5425-5436 : Overview of Silicon-Based Materials*
Nobuo Matsumoto

Semiconductors

5437-5443 : Inverse Modeling as a Basis for Predictive Device Simulation of Deep Submicron Metal-Oxide-Semiconductor Field Effect Transistors
Hiroshi Goto, Seiichiro Yamaguchi and Christoph Jungemann
5444-5450 : Slip Length in Silicon Wafers Caused by Indentation during Heat Treatment
Masanori Akatsuka, Koji Sueoka, Hisashi Katahama, Nobuyuki Morimoto and Naoshi Adachi
5451-5456 : Slow Carrier Relaxation among Sublevels in Annealed Self-Formed InGaAs/GaAs Quantum Dots
Kohki Mukai and Mitsuru Sugawara
5457-5464 : Thermoelastic Analysis of Slip Defect Generation on GaAs Wafers
Shin-ichi Sawada, Hikari Yoshida, Makoto Kiyama and Ryusuke Nakai
5465-5469 : Epitaxial Growth of the GaN Film by Remote-Plasma Metalorganic Chemical Vapor Deposition
Wei-Chi Lai, Chun-Yen Chang, Meiso Yokoyama, Jen-Dar Guo, Jian-Shihn Tsang, Shih-Hsiung Chan, Jong-Shing Bow, Sun-Chin Wei, Ray-Hua Hong and Simon M. Sze
5470-5473 : Change of Spin-Lattice Relaxation Time with Light Soaking for Defects in Hydrogenated Amorphous Silicon
Tatsuo Shimizu, Kazuhiro Kata, Masahiro Mitani and Minoru Kumeda
5474-5479 : Preparation of Position-Controlled Crystal-Silicon Island Arrays by Means of Excimer-Laser Annealing
Chang-Ho Oh and Masakiyo Matsumura
5480-5484 : Optoelectronic and Structural Properties of Good Quality Hydrogenated Amorphous Silicon Carbide Films Deposited by Hot Wire Assisted RF Plasma Deposition Technique
S. Chattopadhyay, Debabrata Das, A. K. Barua, D. L. Williamson and S. T. Kshirsagar
5485-5489 : Infrared Absorption Properties of Nanocrystalline Cubic SiC Films
Yong Sun and Tatsuro Miyasato
5490-5492 : Ultrafast Relaxation of Photoexcited Carriers in Semiconductor Superlattices
Koo-Chul Je and Yup Kim
5493-5496 : Threading Dislocations in Multilayer Structure of InAs Self-Assembled Quantum Dots
Ken-ichi Shiramine, Yasunobu Horisaki, Dai Suzuki, Satoru Itoh, Yoshiki Ebiko, Shunichi Muto,Yoshiaki Nakata and Naoki Yokoyama
5497-5499 : Heteroepitaxy and Multiquantum Well Structure of Layered Compound GaSe/GaSxSe1-x on (001)GaAs Substrate
Maman Budiman, Tamotsu Okamoto, Akira Yamada and Makoto Konagai
5500-5502 : Uniformity of the High Electron Mobility Transistors and Resonant Tunneling Diodes Integrated on an InP Substrate Using an Epitaxial Structure Grown by Molecular Beam Epitaxy and Metalorganic Chemical Vapor Deposition
Koichi Maezawa, Jiro Osaka, Haruki Yokoyama and Masafumi Yamamoto
5503-5506 : Counter-Doped Surface Channel Metal-Oxide-Semiconductor Field-Effect Transistor with High Current Drivability and Steep Subthreshold Slope
Hidetoshi Koike, Toshiyuki Enda, Fumitomo Matsuoka and Naoyuki Shigyo
5507-5509 : Improvement of Reliability of Metal-Oxide Semiconductor Field-Effect Transistors with N2O Nitrided Gate Oxide and N2O Polysilicon Gate Reoxidation
Chao Sung Lai, Tien Sheng Chao, Tan Fu Lei, Chung Len Lee, Tiao Yuan Huang and Chun Yen Chang
5510-5514 : Degradation Modes of InGaAs p-n Diodes Operated at Forward Biases
Yoshinori Wada and Takatomo Enoki
5515-5518 : Effects of Ni Silicidation on the Shallow p+n Junctions Formed by BF2+ Implantation into Thin Polycrystalline-Si Films on Si Substrates
Miin-Horng Juang, Sui-Chan Han and Man-Chun Hu
5519-5525 : Precise Control and Resizing of Polysilicon Gate Length by Hard-Mask Etching
Masaaki Sato and Yoshio Kawai
5526-5532 : A Fully Integrated Aluminum Dual Damascene Process Using a New Double Stopper Structure
Minakshisundaran B. Anand, Naofumi Nakamura, Jun-ichi Wada, Yasushi Oikawa, Tomio Katata, Katsuyasu Shiba and Hideki Shibata
5533-5534 : Noise Current Induced by Switching of a Dielectric Isolated Lateral Insulated Gate Bipolar Transistor on Silicon-on-Insulator
Hitoshi Sumida and Atsuo Hirabayashi

Superconductors

5535-5539 : Anisotropy in Magnetic Hysteresis of BSr2Can-1CunO2n+3 (n=3, 4, 5) Superconductors
Shan Yu, Tetsuya Kawashima, Yoshishige Uchida and Eiji Takayama-Muromachi
5540-5543 : Effects of Grain Boundaries on Temperature Dependence of Microwave Surface Resistance of YBa2Cu3O7-x Thin Films
Mazwi Ben Tunyiswa, Kensuke Nakajima, Jian Chen, Sang-Jae Kim, Huabing Wang and Tsutomu Yamashita

Magnetism

5544-5548 : Crystal Growth and Magnetic Properties of SmFe 2
Hiroaki Samata, Nobuto Fujiwara, Yujiro Nagata, Takayuki Uchida and Ming Der Lan
5549-5553 : Ferroelectric Properties of SrBi2Ta2O9 Thin Films Deposited on Various Bottom Electrodes by a Modified Radio-Frequency Magnetron Sputtering Technique
Cheol-Hoon Yang, Woong-Chul Shin, Eun-Suck Choi, Jun-Sik Hwang,Soon-Gil Yoon, Won-Youl Choi and Ho-Gi Kim
5554-5559 : Numerical Study of Magnetoresistance in Ferromagnetic Tunnel Junctions
Hiroyoshi Itoh,Takao Kumazaki, Jun-ichiro Inoue and Sadamichi Maekawa

Optics and Quantum Electronics

5560-5568 : Analysis of Spherical Target Illumination with Partially Coherent Light through Random Phase Plate
Kouji Tsubakimoto, Masahiro Nakatsuka, Noriaki Miyanaga and Takahisa Jitsuno
5569-5571 : Transverse-Mode Effect of Second-Harmonic Generation of Ultrashort Laser Pulses with Time Delay
Tiejun Zhang and Motoki Yonemura
5572-5577 : Optical Nonlinearities of Bis(4-dimethylaminodithiobenzil)-nickel Solution in the Nanosecond Regime
Hongpu Li and Kazuhiko Ogusu
5578-5581 : Alternative Interpretation of Impulse Response of Phonon-Polaritons
Hitoshi Kawashima, Fumio Sasaki, Shunsuke Kobayashi and Toshiro Tani
5582-5587 : Waveguiding Epitaxial Potassium Lithium Niobate Single-Crystal Films Deposited by Metalorganic Chemical Vapor Deposition
Kiyofumi Chikuma, Atsushi Onoe and Ayako Yoshida
5588-5592 : Electro-Optic Intensity Modulator Using a Novel Urethane-Urea Copolymer
Osamu Watanabe, Masaaki Tsuchimori, Akane Okada and Hiroshi Ito
5593-5597 : Development of Planar Optics for an Optical Tracking Sensor
Hiroyuki Kawano and Tomohiro Sasagawa
5598-5603 : An Improved Method for Wind Measurements with a Conical-Scanning Correlation Lidar
Nobuo Sugimoto, Ichiro Matsui, Mego Pinandito, Takakazu Ishii,Shigeru Murata and Noboru Yasuda
5604-5608 : Fabrication of Lens Rasters Using a Laser Beam Scanning Method
Hyung-Wook Jeon, Hyuk-Soo Lee, Jung-Young Son, Vadim V. Smirnov,Yong-Jin Choi and You-Seek Chun

Optical Properties of Condensed Matter

5609-5613 : Optical Absorption Properties of Indium-Doped Thin Crystalline Silicon Films
Hiroto Kasai and Hideki Matsumura
5614-5617 : Optical and Electrical Properties of Sn-doped Indium Oxide Films Deposited on Polyester by Reactive Evaporation
Jin Ma, Dehang Zhang, Shuying Li, Junqing Zhao and Honglei Ma
5618-5619 : Piezooptic Behaviour of Li2Ge7O15 Crystals
A. K. Bain, K. Veerabhadra Rao, Prem Chand, Toshihisa Yamaguchi and Mitsuo Wada
5620-5621 : Image-Charge and Excitonic Effects on the Oscillator Strength of Silicon Quantum Dots
Masao Iwamatsu

Electrical Properties of Condensed Matter

5622-5624 : Thermal Properties of InAs0.86Sb0.05P0.09 Homostructure Diodes
Lung-Chien Chen, Meng-Chyi Wu and Wen-Jeng Ho
5625-5629 : Dielectric Behavior of (1-x)LaAlO3-xSrTiO3 Solid Solution System at Microwave Frequencies
Pai-hsuan Sun,Tetsuro Nakamura, Yue Jin Shan, Yoshiyuki Inaguma, Mitsuru Itoh and Toshiki Kitamura
5630-5633 : Imprint of Oriented Pb(Zr, Ti)O 3 Thin Films with Oxygen Atmosphere in Cooling Process
Hee-Soo Lee, Keun-Ho Auh, Min-Seok Jeon, Woo-Sik Um, In-Shik Lee, Gwang-Pyo Choi and Ho-Gi Kim
5634-5637 : Temperature Dependence of Piezoelectric, Dielectric, and Elastic Properties of Lead Lanthanum Zirconate Titanate Ceramics
Vid Bobnar, Zdravko Kutnjak andAdrijan Levstik
5638-5644 : Structural and Electrical Characteristics of Ba(Zr0.12Ti0.88)O3 Thin Films Deposited on LaNiO3 Electrode by RF Magnetron Sputtering
Hsiou-Jeng Shy and Tai-Bor Wu
5645-5650 : Dielectric Properties of PbTiO3 Thin Films on CeO2/Si(100) and Y2O3/Si(100)
Ye-Min Wu and Jyi-Tsong Lo
5651-5654 : Effects of Ambient Gas on Dielectric Constant of Sputtered SrTiO3 Epitaxial Thin Films
Shuichi Komatsu, Kazuhide Abe and Noburu Fukushima
5655-5658 : Determination of Dielectric Relaxation Time of Langmuir-Films by a Whole-Curve Method Using the Maxwell Displacement Current
Yoko Sato, Chen-Xu Wu, Yutaka Majima and Mitsumasa Iwamoto
5659-5662 : An Ultrasonic Motor Using a Metal-Ceramic Composite Actuator Generating Torsional Displacement
Burhanettin Koc, Aydin Dogan, Yuan Xu, Robert E. Newnham and Kenji Uchino

Structure and Mechanical and Thermal Properties of Condensed Matter

5663-5668 : Thermal and Optical Stabilities of Photoisomerizable Polyimide Layers for Nematic Liquid Crystal Alignments
Byoungchoo Park, Youngyi Jung, Hyun-Hee Choi, Ha-Keun Hwang, Youngkyoo Kim, Sooman Lee, Sei-Hum Jang, Masa-aki Kakimoto and Hideo Takezoe
5669-5673 : An Optical Sensing System Using Liquid Crystal Cells and a Corner Cube Prism Coated with Dye Films for Simultaneous Detection of an Electric Field and Decomposition Products of SF6
Marenori Kawamura and Susumu Sato
5674-5679 : Growth and Evaluation of Cd1-yZnyTe Epilayers on (100) GaAs Substrates by Hot Wall Epitaxy
Bonheun Koo, Jifeng Wang, Yukio Ishikawa and Minoru Isshiki
5680-5686 : Neutron Diffraction Measurements of Inner Local Strain of Fatigued Carbon Steel
Kazuko Inoue, Takeshi Horikawa, Hiroshi Nakamura, Toshiaki Arai, Nobuaki Minakawa, Yoshinori Tsuchiya, Yukio Morii and Yasuo Yamaguchi
5687-5690 : Soft Modes Responsible for \alpha -\beta and \beta -\gamma Phase Transitions of KIO3 Crystals
Muhtar Ahart, Seiji Kojima, Masayoshi Takagi, Masaki Maeda and Ikuo Suzuki
5691-5696 : Formation of F- and P-Type Icosahedral Quasicrystals in the Zn-Mg-Ho Alloy System*
Takayuki Shimizu and Tsutomu Ishimasa

Surfaces, Interfaces, and Films

5697-5700 : Surface Structure of N/Pd(100)-c(2×2) Determined by Tensor Low Energy Electron Diffraction Analysis
Tomoyuki Kayama, Hiroshi Hamamatsu, Toshihiko Yokoyama and Toshiaki Ohta
5701-5707 : Ru Electrode Deposited by Sputtering in Ar/O2 Mixture Ambient
Tomonori Aoyama, Atsushi Murakoshi and Keitaro Imai
5708-5713 : Physical Properties of Heavily B-doped Microcrystalline Si-Ge Alloys and Schottky Barrier of B-Si-Ge/P-Si
Yukio Osaka, Kenji Kohno and Yukiya Tanabe
5714-5718 : Study on Preparation Conditions of High-Quality ZrN Thin Films Using a Low-Temperature Process
Hideto Yanagisawa, Katsutaka Sasaki, Yoshio Abe, Midori Kawamura and Satoko Shinkai
5719-5725 : Monte Carlo Simulation of Emission Efficiency of Cone-shaped Metal-Insulator-Semiconductor Cathode
Kazunori Inoue, Yasuhito Gotoh, Yoshikazu Fujimori, Masayoshi Nagao, Shinji Sadakane, Hiroshi Tsuji and Junzo Ishikawa
5726-5727 : Evaluation of Free Energy on Si(110) Surface
Youiti Yamamoto
5728-5729 : Raman Scattering Studies of CuInS2 Films Grown by RF Ion Plating
Ken-ichi Kondo, Susumu Nakamura and Katsuaki Sato

Nuclear Science, Plasmas, and Electric Discharges

5730-5734 : Positive Ions in RF Discharge Plasmas of C4F8/Ar and C4F8/O2 Mixtures
Yuji Hirose, Itsuo Ishikawa, Shinya Sasaki, Kazuya Nagaseki, Yukinori Saito and Shinji Suganomata
5735-5741 : Hollow Density Profile on Electron Cyclotron Resonance Heating JFT-2M Plasma
Toshihiko Yamauchi, Katsumichi Hoshino, Hisato Kawashima, Toshihide Ogawa,Tomohide Kawakami, Tomio Shiina and Youichi Ishige
5742-5745 : Microwave Plasma in a Multicusp Circular Waveguide with a Dimension below Cutoff
Sudeep Bhattacharjee and Hiroshi Amemiya
5746-5750 : High-Density Plasma Produced by a Holey-Plate Surface-Wave Structure Cavity
Yoshikazu Yoshida and Takeki Sakurai
5751-5756 : Concentric Spread Plasma Source
Seiichi Watanabe, Masahiro Sumiya and Sunao Kawasaki
5757-5762 : Transition of Particle Growth Region in SiH4 RF Discharges
Hiroharu Kawasaki, Kazutaka Sakamoto, Shinichi Maeda, Tsuyoshi Fukuzawa,Masaharu Shiratani and Yukio Watanabe
5763-5766 : Surface Kinetics of CFx Radicals and Fluorine Atoms in the Afterglow of High-Density C4F8 Plasmas
Chihiro Suzuki, Koichi Sasaki and Kiyoshi Kadota

Atoms, Molecules, and Chemical Physics

5767-5771 : Determination of Collisional Quenching Rate for the 4D3/2 State in SrII
Iku Hirano, Jun Yoda, Feng-Lei Hong, Kenichiro Okumura and Atsushi Onae
5772-5774 : Velocity Distribution Measurements of a Supersonic Methane Molecular Beam Reflected from a Pt(111) Surface at Various Reflection Angles
Shinjiro Yagyu, Hisae Kita, Yasunobu Kino, Kouta Ozeki, Masahiro Sasaki and Shigehiko Yamamoto
5775-5780 : Electronic State Distributions of He(ns, np, nd) Rydberg States Produced from Three-Body Collisional Radiative Recombination of He+ in a Helium Flowing Afterglow
Masaharu Tsuji, Masafumi Nakamura, Erika Oda, Masahiro Hisano and Yukio Nishimura
5781-5785 : Theoretical Calculations of Sensitivity of Deprotection Reactions for Acrylic Polymers for 193 nm Lithography II: Protection Groups Containing an Adamantyl Unit
Nobuyuki N. Matsuzawa, Satoshi Takechi, Takeshi Ohfuji, Koichi Kuhara, Shigeyasu Mori, Masayuki Endo, Kazuya Kamon, Taku Morisawa, Atsuko Yamaguchi and Masaru Sasago
5786-5788 : Comparison of Copper and Stainless Steel Used for Low Voltage Electrode in Wire-to-Plane Electrode Configuration for NO x Treatment
Robert Gasparik, Chobei Yamabe, Satoshi Ihara and Saburoh Satoh
5789-5792 : Effects of Doping of Fullerene Derivative in a Self-Assembled Multilayer of Conducting Polymers
Tsuyoshi Kawai, Takahiro Yamaue, Mitsuyoshi Onoda and Katsumi Yoshino
5793-5797 : Determination of the Anisotropic Optical Constant of Evaporated Polydiacetylene-C4UC4 Films at 632.8 nm
Tatsuo Hasegawa, Toshihiro Okamoto, Masanobu Haraguchi, Masuo Fukui, Takao Koda and Kenji Takeda
5798-5799 : A Solid-State Electrochemical Device Using Poly(pyrrole) as Micro-actuator
Katsumi Yamada, Yuichiro Kume and Hiroshi Tabe

Instrumentation, Measurement, and Fabrication Technology

5800-5807 : Noncontact Measurement of Doping Profile for Bare Silicon
Motohiro Kohno, Hideaki Matsubara, Hiroshi Okada, Sadao Hirae and Takamasa Sakai
5808-5814 : Evaluation of Cu and Pb Particles with Different Sizes as Regenerator Materials in the Gifford-McMahon-Cycle Refrigerator
Tetsushi Biwa, Hiroshi Ikuta and Uichiro Mizutani
5815-5820 : A Fast Method of Simulating Resist Pattern Contours Based on Mean Inhibitor Concentration
Hiroyuki Kubota, Akemi Moniwa and Tsuneo Terasawa
5821-5822 : X-Ray Fluorescence Analysis by Multiple-Glancing X-Ray Beam Excitation
Kouichi Tsuji, Tasaku Sato, and Kazuaki Wagatsuma

General Physics

5823-5834 : Thermo-Flow Structure and Epitaxial Uniformity in Large-Scale Metalorganic Chemical Vapor Deposition Reactors with Rotating Susceptor and Inlet Flow Control
Chyi-Yeou Soong, Chung-Hsing Chyuan and Ruey-Yau Tzong
5835-5838 : Plural Sonoluminescing Bubbles in Acoustic Fields of Higher Mode
Takao Kokubun, Shigeo Hayashi, Qian Han, and Tomoo Kamakura

Cross-Disciplinary Areas

5839-5841 : Solution of the Knapsack Problem by Deoxyribonucleic Acid Computing
Yohei Aoi,Tatsuo Yoshinobu, Katsuyuki Tanizawa,Kozo Kinoshita and Hiroshi Iwasaki

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