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Table of Contents: Vol. 44, No. 7B (2005)

Special Issue: Scanning Probe Microscopy / Microprocesses & Nanotechnology

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Scanning Probe Microscopy

5325-5327 : Dissipation Imaging with Low Amplitude off-Resonance Atomic Force Microscopy
H. Özgür Özer, Simon J. O'Brien, Andrew Norris, John E. Sader and John B. Pethica
Published July 26, 2005
[Abstract] [Full Text PDF (132K)] [Buy This Article]
5328-5331 : Kondo Effect of Co Adatoms on Ag Monolayers on Noble Metal Surfaces
M. Alexander Schneider, Peter Wahl, Lars Diekhöner, Lucia Vitali, Gero Wittich and Klaus Kern
Published July 26, 2005
[Abstract] [Full Text PDF (139K)] [Buy This Article]
5332-5335 : Scanning Tunneling Microscopy and Spectroscopy of Phthalocyanine Molecules on Metal Surfaces
Masaki Takada and Hirokazu Tada
Published July 26, 2005
[Abstract] [Full Text PDF (146K)] [Buy This Article]
5336-5338 : Exploiting Metal Coating of Carbon Nanotubes for Scanning Tunneling Microscopy Probes
Yuya Murata, Shinya Yoshimoto, Masaru Kishida, Daisuke Maeda, Tatsuro Yasuda, Takashi Ikuno, Shin-ichi Honda, Hideaki Okado, Rei Hobara, Iwao Matsuda, Shuji Hasegawa, Kenjiro Oura and Mitsuhiro Katayama
Published July 26, 2005
[Abstract] [Full Text PDF (213K)] [Buy This Article]
5339-5343 : Ultrahigh-Density Ferroelectric Data Storage Based on Scanning Nonlinear Dielectric Microscopy
Yasuo Cho
Published July 26, 2005
[Abstract] [Full Text PDF (293K)] [Buy This Article]
5344-5347 : Measurement of Electron Transport Properties of Single Molecules
Xiulan Li, Bingqian Xu, Xiaoyin Xiao, Joshua Hihath and Nongjian Tao
Published July 26, 2005
[Abstract] [Full Text PDF (149K)] [Buy This Article]
5348-5353 : ab initio Calculation of Capacitance of Nanostructures
Kazuyuki Watanabe, Satoshi Watanabe, Michiko Tanaka and Noriyuki Nakaoka
Published July 26, 2005
[Abstract] [Full Text PDF (168K)] [Buy This Article]
5354-5357 : Analysis of Time-Resolved Tunnel Current Signal in Sub-Picosecond Range Observed by Shaken-Pulse-Pair-Excited Scanning Tunneling Miscroscopy
Osamu Takeuchi, Masahiro Aoyama and Hidemi Shigekawa
Published July 26, 2005
[Abstract] [Full Text PDF (236K)] [Buy This Article]
5358-5361 : Nanometer-scale Mechanical/Structural Properties of Molybdenum Dithiocarbamate and Zinc Dialkylsithiophosphate Tribofilms and Friction Reduction Mechanism
Jiping Ye, Sawa Araki, Makoto Kano and Yoshiteru Yasuda
Published July 26, 2005
[Abstract] [Full Text PDF (245K)] [Buy This Article]
5362-5364 : Imaging and Manipulation of Initial Oxidation Product on Si(111)-(7×7)
Hiroshi Okuyama, Takashi Yamada and Tetsuya Aruga
Published July 26, 2005
[Abstract] [Full Text PDF (174K)] [Buy This Article]
5365-5369 : Simple Model of Electronic Density of States of Graphite and Its Application to the Investigation of Superlattices
Wing-Tat Pong and Colm Durkan
Published July 26, 2005
[Abstract] [Full Text PDF (398K)] [Buy This Article]
5370-5373 : Kelvin Probe Force Microscopy Study of Conjugated Polymer/Fullerene Organic Solar Cells
Thilo Glatzel, Harald Hoppe, Niyazi S. Sariciftci, Martha Ch. Lux-Steiner and Masaharu Komiyama
Published July 26, 2005
[Abstract] [Full Text PDF (218K)] [Buy This Article]
5374-5377 : Long-Ranged and Short-Ranged Electrostatic Interaction Between Modified Silicon Surfaces and Recombinant Ferritin Molecules
Tomohiro Hayashi and Masahiko Hara
Published July 26, 2005
[Abstract] [Full Text PDF (309K)] [Buy This Article]
5378-5381 : Self-Assembled Monolayers of Alkanethiol and Fluoroalkanethiol Investigated by Noncontact Atomic Force Microscopy
Takashi Ichii, Masashi Urabe, Takeshi Fukuma, Kei Kobayashi, Kazumi Matsushige and Hirofumi Yamada
Published July 26, 2005
[Abstract] [Full Text PDF (185K)] [Buy This Article]
5382-5385 : Electronic Conduction through Single Molecule of New π-Conjugated System Measured by Scanning Tunneling Microscopy
Kenichi Ishizuka, Masaaki Suzuki, Shintaro Fujii, Uichi Akiba, Yuuki Takayama, Fumie Sato and Masamichi Fujihira
Published July 26, 2005
[Abstract] [Full Text PDF (161K)] [Buy This Article]
5386-5389 : Tunneling Spectroscopy Analysis of Hexachloro-Fluorescein Phosphoramidite Fluorescent Dye Attached to Deoxyribonucleic Acid
Toshio Kawahara, Takuya Takahashi, Hiroyuki Tanaka and Tomoji Kawai
Published July 26, 2005
[Abstract] [Full Text PDF (1648K)] [Buy This Article]
5390-5392 : Direct Observation of Conformational Isomers of (CH3S)2 Molecules on Cu (111)
Michiaki Ohara, Yousoo Kim and Maki Kawai
Published July 26, 2005
[Abstract] [Full Text PDF (321K)] [Buy This Article]
5393-5396 : Atomic Force Microscopy of Mechanical Property of Natural Rubber
Hiroyuki Watabe, Motonori Komura, Ken Nakajima and Toshio Nishi
Published July 26, 2005
[Abstract] [Full Text PDF (371K)] [Buy This Article]
5397-5399 : Atomic Force Microscopy on Imogolite, Aluminosilicate Nanotube, Adsorbed on Au(111) Surface
Yoshihisa Ohrai, Tomoaki Gozu, Shoji Yoshida, Osamu Takeuchi, Sumio Iijima and Hidemi Shigekawa
Published July 26, 2005
[Abstract] [Full Text PDF (194K)] [Buy This Article]
5400-5402 : Site-Selective Deposition of Au Nanoparticles on Au Islands on Highly Oriented Pyrolytic Graphite Substrate Using DNA-Based Method
Yasushi Maeda, Yukiko Y. Maeda, Tomoko Okada, Masato Kodaka, Tadahiro Fujitani and Susumu Tsubota
Published July 26, 2005
[Abstract] [Full Text PDF (82K)] [Buy This Article]
5403-5408 : Alkyl-Chain-Length Dependence of Frictional Properties of Alkyl-Substituted Phthalocyanines Physisorbed on Graphite Surfaces
Koji Miyake, Yukari Hori, Taichi Ikeda, Masumi Asakawa, Toshimi Shimizu, Takao Ishida and Shinya Sasaki
Published July 26, 2005
[Abstract] [Full Text PDF (260K)] [Buy This Article]
5409-5412 : Carbon Multiprobes with Nanosprings Integrated on Si Cantilever Using Focused-Ion-Beam Technology
Masao Nagase, Kenichiro Nakamatsu, Shinji Matsui and Hideo Namatsu
Published July 26, 2005
[Abstract] [Full Text PDF (178K)] [Buy This Article]
5413-5416 : Structural Stability of Si(001) and Ge(001) in External Electric Fields
Jun Nakamura and Akiko Natori
Published July 26, 2005
[Abstract] [Full Text PDF (86K)] [Buy This Article]
5417-5420 : Formation of Molecular Wires by Nanospace Polymerization of a Diacetylene Derivative Induced with a Scanning Tunneling Microscope at a Solid-Liquid Interface
Satoru Nishio, Daizo I-i, Hiroshi Matsuda, Masahito Yoshidome, Hiroshi Uji-i and Hiroshi Fukumura
Published July 26, 2005
[Abstract] [Full Text PDF (246K)] [Buy This Article]
5421-5424 : Visualization of Elasticity Distribution of Single Human Chromosomes by Scanning Probe Microscopy
Keisuke Nomura, Osamu Hoshi, Daisuke Fukushi, Tatsuo Ushiki, Hisashi Haga and Kazushige Kawabata
Published July 26, 2005
[Abstract] [Full Text PDF (143K)] [Buy This Article]
5425-5429 : Nanorheological Analysis of Polymer Surfaces by Atomic Force Microscopy
Hideyuki Nukaga, So Fujinami, Hiroyuki Watabe, Ken Nakajima and Toshio Nishi
Published July 26, 2005
[Abstract] [Full Text PDF (186K)] [Buy This Article]
5430-5433 : Connection of Herringbone Ridges on Reconstructed Au(111) Surfaces Observed by Scanning Tunneling Microscopy
Hirofumi Oka and Kazuhisa Sueoka
Published July 26, 2005
[Abstract] [Full Text PDF (189K)] [Buy This Article]
5434-5437 : Prototype of Atomic Force Cantilevered SNOM Based on Through-The-Lens-Type Optical Lever and Polarized Illumination and Detection System
Masayuki Ono, Hayato Sone and Sumio Hosaka
Published July 26, 2005
[Abstract] [Full Text PDF (301K)] [Buy This Article]
5438-5442 : Adsorption of Fluorescein Isothiocyanate Isomer-I (FITC-I) Dye on TiO2(110) from an Acetone Solution
Chi Lun Pang, Taka-aki Ishibashi and Hiroshi Onishi
Published July 26, 2005
[Abstract] [Full Text PDF (241K)] [Buy This Article]
5443-5446 : Observation of Large-Scale Features on Graphite by Scanning Tunnelling Microscopy
Wing-Tat Pong, James Bendall and Colm Durkan
Published July 26, 2005
[Abstract] [Full Text PDF (246K)] [Buy This Article]
5447-5450 : Defect-Induced Charge Freezing on Epitaxial Fe3O4(001) Film Surfaces Studied by Spin-Polarized Scanning Tunneling Microscopy
Agus Subagyo and Kazuhisa Sueoka
Published July 26, 2005
[Abstract] [Full Text PDF (1228K)] [Buy This Article]
5451-5454 : Spatiotemporal Variation in Cellular Stiffness Corresponding to Development of Morphological Polarity
Satoshi Toko, Takeomi Mizutani, Hisashi Haga and Kazushige Kawabata
Published July 26, 2005
[Abstract] [Full Text PDF (137K)] [Buy This Article]
5455-5458 : Cobalt Chemical Vapor Deposition Process on Molybdenite Basal Plane Observed by Ultrahigh-Vacuum Scanning Tunneling Microscopy
Masaharu Komiyama, Kohei Kiyohara, Eisuke Yoda, Takeshi Kubota and Yasuaki Okamoto
Published July 26, 2005
[Abstract] [Full Text PDF (171K)] [Buy This Article]
5459-5461 : Theoretical Analysis of Apparent Barrier Height on an Al Surface: Difference by Measurement Methods
Hideomi Totsuka, Shinnosuke Furuya and Satoshi Watanabe
Published July 26, 2005
[Abstract] [Full Text PDF (160K)] [Buy This Article]
5462-5465 : Investigation of Interaction of Hydrogen with Oxygen-Induced Nb(100) Surfaces by Scanning Tunneling Microscopy
Bai An, Lin Zhang, Mao Wen, Seiji Fukuyama, Kiyoshi Yokogawa and Masamichi Yoshimura
Published July 26, 2005
[Abstract] [Full Text PDF (206K)] [Buy This Article]

Microprocesses & Nanotechnology

DUV, VUV, EUV and X-ray Lithography

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5467-5473 : Mask Pattern Correction by Energy Loss Compensation in Extreme Ultraviolet Lithography
Minoru Sugawara, Iwao Nishiyama and Mikio Takai
Published July 26, 2005
[Abstract] [Full Text PDF (244K)] [Buy This Article]
5474-5478 : Actinic Mask Inspection Using an EUV Microscope —Preparation of a Mirau Interferometer for Phase-Defect Detection—
Kazuhiro Hamamoto, Yuzuru Tanaka, Hirotake Kawashima, Seung Yoon Lee, Nobuyuki Hosokawa, Noriyuki Sakaya, Morio Hosoya, Tsutomu Shoki, Takeo Watanabe and Hiroo Kinoshita
Published July 26, 2005
[Abstract] [Full Text PDF (243K)] [Buy This Article]
5479-5483 : Particle Adhesion and Removal on EUV Mask Layers During Wet Cleaning
Sang-Ho Lee, Yi-Koan Hong, Jae-Hoon Song, Jin-Goo Park, Ahmed A. Busnaina, Guojing Zhang, Florence Eschbach and Arun Ramamoorthy
Published July 26, 2005
[Abstract] [Full Text PDF (149K)] [Buy This Article]
5484-5488 : Depth Profile and Line-Edge Roughness of Low-Molecular-Weight Amorphous Electron Beam Resists
Taku Hirayama, Daiju Shiono, Shogo Matsumaru, Toshiyuki Ogata, Hideo Hada, Junichi Onodera, Tadashi Arai, Toshio Sakamizu, Atsuko Yamaguchi, Hiroshi Shiraishi, Hiroshi Fukuda and Mitsuru Ueda
Published July 26, 2005
[Abstract] [Full Text PDF (284K)] [Buy This Article]
5489-5495 : Intrinsic Problem Affecting Contact Hole Resolution in Hyper NA Era
Seiji Matsuura, Eiji Kurose and Kiyoshi Fujii
Published July 26, 2005
[Abstract] [Full Text PDF (238K)] [Buy This Article]
5496-5499 : Detection of Streptavidin-Biotin Protein Complexes Using Three-Dimensional MOSFET in the Si Micro-Fluidic Channel
Dae-Il Han, Dong-Sun Kim, Jee-Eun Park, Jang-Kyoo Shin, Seong-Ho Kong, Pyung Choi, Jong-Hyun Lee and Geunbae Lim
Published July 26, 2005
[Abstract] [Full Text PDF (201K)] [Buy This Article]
5500-5504 : Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation
Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori and Hirotsugu Hara
Published July 26, 2005
[Abstract] [Full Text PDF (410K)] [Buy This Article]
5505-5514 : Tool-Induced Shift and Pupil Transmittance Distribution in Measurement Optics
Ayako Sugaya, Tadashi Nagayama and Takahiro Masada
Published July 26, 2005
[Abstract] [Full Text PDF (195K)] [Buy This Article]
5515-5519 : A Simulation of Energy-Filtered Backscattered Electron Signals from Subsurface Cu Interconnect Structures
Masaaki Yasuda, Yusuke Suzuki, Hiroaki Kawata and Yoshihiko Hirai
Published July 26, 2005
[Abstract] [Full Text PDF (183K)] [Buy This Article]
5520-5525 : Focus and Dose Measurement Method in Volume Production
Hideki Ina, Satoru Oishi and Koichi Sentoku
Published July 26, 2005
[Abstract] [Full Text PDF (121K)] [Buy This Article]
5526-5534 : Full-Chip Implementation of IDEALSmile on 90-nm-Node Devices by ArF Lithography
Kenji Yamazoe, Pietro Cantú, Gianfranco Capetti, Elena Evangelista, Yasuo Hasegawa, Junji Iwasa, Olivier Toublan, Sara Loi, Marco Lupo, Annalisa Pepe, Toshihisa Kuno, Akiyoshi Suzuki and Kenji Saitoh
Published July 26, 2005
[Abstract] [Full Text PDF (302K)] [Buy This Article]
5535-5539 : Evaluation of Performance of Proximity Effect Correction in Electron Projection Lithography
Morimi Osawa, Kozo Ogino, Hiromi Hoshino, Yasuhide Machida, Fumihiro Koba, Hiroshi Yamashita and Hiroshi Arimoto
Published July 26, 2005
[Abstract] [Full Text PDF (201K)] [Buy This Article]
5540-5543 : Development of Beam Splitter Using Multilayer Membrane for Extreme Ultraviolet Phase-Shift Microscopes
Nobuyuki Hosokawa, Takeo Watanabe, Noriyuki Sakaya, Tsutomu Shoki, Kazuhiro Hamamoto and Hiroo Kinoshita
Published July 26, 2005
[Abstract] [Full Text PDF (428K)] [Buy This Article]
5544-5546 : Optimizing Operational Parameters for Z-Pinch EUV Source by Artificial Neural Network
Chaohai Zhang, Sunao Katsuki, Takashi Sakugawa, Akira Kimura, Haruhiko Fukumoto, Takao Namihira and Hidenori Akiyama
Published July 26, 2005
[Abstract] [Full Text PDF (152K)] [Buy This Article]
5547-5551 : Reducing off Hydrocarbon Contaminants for EUVL
Yuzuru Tanaka, Kazuhiro Hamamoto, Harushige Tsubakino, Takeo Watanabe and Hiroo Kinoshita
Published July 26, 2005
[Abstract] [Full Text PDF (163K)] [Buy This Article]
5552-5555 : Contamination Evaluation System for Extreme Ultraviolet Mirrors with the Use of Undulator Radiation
Masahito Niibe, Yukinobu Kakutani, Kazuya Kakiuchi, Shigeru Terashima, Hiromitu Takase, Yoshio Gomei, Takashi Aoki, Shuichi Matsunari, Hiroyuki Kondo and Yasuaki Fukuda
Published July 26, 2005
[Abstract] [Full Text PDF (171K)] [Buy This Article]
5556-5559 : Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU
Takeo Watanabe, Hiroo Kinoshita, Noriyuki Sakaya, Tsutomu Shoki and Seung Yoon Lee
Published July 26, 2005
[Abstract] [Full Text PDF (145K)] [Buy This Article]
5560-5564 : Laser Shock Removal of Nanoparticles from Si Capping Layer of Extreme Ultraviolet Lithography Masks
Sang-Ho Lee, Young-Jae Kang, Jin-Goo Park, Ahmed A. Busnaina, Jong-Myung Lee, Tae-Hoon Kim, Guojing Zhang, Florence Eschbach and Arun Ramamoorthy
Published July 26, 2005
[Abstract] [Full Text PDF (303K)] [Buy This Article]

Electron- and Ion-Beam Lithography

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5565-5569 : Experimental Evaluation of Arrayed Microcolumns with Monolithic Structure
Jin Woo Jeong, Dae Jun Kim, Ho Seob Kim, Sang Kuk Choi, Dae Yong Kim and Hyeong Rag Lee
Published July 26, 2005
[Abstract] [Full Text PDF (792K)] [Buy This Article]
5570-5574 : Feasibility Study of Multiple-Beam Scanning Electron Microscopy for Defect Inspection
Mamoru Nakasuji, Shoji Yoshikawa, Tohru Satake and Nobuharu Noji
Published July 26, 2005
[Abstract] [Full Text PDF (154K)] [Buy This Article]
5575-5580 : Impact of Long-Period Line-Edge Roughness (LER) on Accuracy in Critical Dimension (CD) Measurement and New Guideline for CD Metrology
Atsuko Yamaguchi, Hiroshi Fukuda, Hiroki Kawada and Takashi Iizumi
Published July 26, 2005
[Abstract] [Full Text PDF (480K)] [Buy This Article]
5581-5585 : 10-nm-Scale Pattern Delineation Using Calixarene Electron Beam Resist for Complementary Metal Oxide Semiconductor Gate Etching
Mitsuru Narihiro, Kohichi Arai, Masahiko Ishida, Yukinori Ochiai and Yasutaka Natsuka
Published July 26, 2005
[Abstract] [Full Text PDF (291K)] [Buy This Article]
5586-5589 : Highly Accurate Grating Reference Fabricated by EB Cell Projection Lithography
Yoshinori Nakayama
Published July 26, 2005
[Abstract] [Full Text PDF (380K)] [Buy This Article]
5590-5594 : Highly Accurate Proximity Effect Correction for 100 kV Electron Projection Lithography
Fumihiro Koba, Hiroshi Yamashita and Hiroshi Arimoto
Published July 26, 2005
[Abstract] [Full Text PDF (147K)] [Buy This Article]
5595-5599 : Deposited Energy Dependence of Surface Roughness of Polymethylmethacrylate Irradiated by Electron Beam
Masatoshi Kotera, Hirohisa Niu, Taro Hosokawa and Kei Yagura
Published July 26, 2005
[Abstract] [Full Text PDF (264K)] [Buy This Article]

Nanoimprint, Nanoprint and Rising Lithography

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5600-5605 : Nanoimprint of Glass Materials with Glassy Carbon Molds Fabricated by Focused-Ion-Beam Etching
Masaharu Takahashi, Kohichi Sugimoto and Ryutaro Maeda
Published July 26, 2005
[Abstract] [Full Text PDF (490K)] [Buy This Article]
5606-5608 : Technology for Fabrication of Nanostructures by Standard Cleanroom Processing and Nanoimprint Lithography
Brian Bilenberg, Søren Jacobsen, Carine Pastore, Theodor Nielsen, Simon Riis Enghoff, Claus Jeppesen, Asger Vig Larsen and Anders Kristensen
Published July 26, 2005
[Abstract] [Full Text PDF (96K)] [Buy This Article]
5609-5616 : Issues in Nanoimprint Processes: the Imprint Pressure
Hella-Christin Scheer, Nicolas Bogdanski and Matthias Wissen
Published July 26, 2005
[Abstract] [Full Text PDF (177K)] [Buy This Article]
5617-5621 : Fabrication of Low Line Edge Roughness Mold by Spin On Glass (SOG) Replica Method
Yuichi Kurashima, Hiroshi Hiroshima, Masanori Komuro, Naoto Yamazaki, Jun Taniguchi and Iwao Miyamoto
Published July 26, 2005
[Abstract] [Full Text PDF (220K)] [Buy This Article]
5622-5626 : Line Width Reproducibility of Photo-Nanoimprints
Hiroshi Hiroshima, Yuichi Kurashima and Masanori Komuro
Published July 26, 2005
[Abstract] [Full Text PDF (206K)] [Buy This Article]
5627-5630 : Resolution in New Nanofabrication Technique Combining Electron-Beam-Induced Deposition and Low-Energy Ion Milling
Kazutaka Mitsuishi, Masayuki Shimojo, Miyoko Tanaka, Masaki Takeguchi and Kazuo Furuya
Published July 26, 2005
[Abstract] [Full Text PDF (176K)] [Buy This Article]

Nanofabrication and Related Nanodevices

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5631-5634 : Fabrication of Alpha-Iron and Iron Carbide Nanostructures by Electron-Beam Induced Chemical Vapor Deposition and Postdeposition Heat Treatment
Masaki Takeguchi, Masayuki Shimojo and Kazuo Furuya
Published July 26, 2005
[Abstract] [Full Text PDF (136K)] [Buy This Article]
5635-5638 : Morphology of Iron Silicide Nanorods Formed by Electron-Beam-Induced Deposition Using Ultrahigh-Vacuum Transmission Electron Microscope
Miyoko Tanaka, Ming Han, Masaki Takeguchi, Fengmin Chu, Masayuki Shimojo, Kazutaka Mitsuishi and Kazuo Furuya
Published July 26, 2005
[Abstract] [Full Text PDF (187K)] [Buy This Article]
5639-5641 : Position-Controlled Carbon Fiber Growth Catalyzed Using Electron Beam-Induced Chemical Vapor Deposition Ferrocene Nanopillars (Brief Communication)
Takahito Mukawa, Satoshi Okada, Ryota Kobayashi, Jun-ichi Fujita, Masahiko Ishida, Toshinari Ichihashi, Yukinori Ochiai, Takashi Kaito and Shinji Matsui
Published July 26, 2005
[Abstract] [Full Text PDF (124K)] [Buy This Article]
5642-5645 : Vertically Aligned Carbon Nanotubes Grown at Low Temperatures for Use in Displays
Goichi Takeda, Lujun Pan, Seiji Akita and Yoshikazu Nakayama
Published July 26, 2005
[Abstract] [Full Text PDF (353K)] [Buy This Article]
5646-5650 : Growth Manner and Mechanical Characteristics of Amorphous Carbon Nanopillars Grown by Electron-Beam-Induced Chemical Vapor Deposition
Satoshi Okada, Takahito Mukawa, Ryota Kobayashi, Jun-ichi Fujita, Masahiko Ishida, Toshinari Ichihashi, Yukinori Ochiai, Takashi Kaito and Shinji Matsui
Published July 26, 2005
[Abstract] [Full Text PDF (199K)] [Buy This Article]
5651-5653 : Nanodot and Nanorod Formation in Electron-Beam-Induced Deposition Using Iron Carbonyl (Brief Communication)
Masayuki Shimojo, Wei Zhang, Masaki Takeguchi, Miyoko Tanaka, Kazutaka Mitsuishi and Kazuo Furuya
Published July 26, 2005
[Abstract] [Full Text PDF (147K)] [Buy This Article]
5654-5658 : Fabrication and Characterization of Self-Standing W-Nanodendrites on Insulator SiO2 Substrate by Electron-Beam-Induced Deposition under HVTEM
Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi and Kazuo Furuya
Published July 26, 2005
[Abstract] [Full Text PDF (270K)] [Buy This Article]
5659-5663 : Modeling the Process of Electron-Beam-Induced Deposition by Dynamic Monte Carlo Simulation
Zhi-Quan Liu, Kazutaka Mitsuishi and Kazuo Furuya
Published July 26, 2005
[Abstract] [Full Text PDF (244K)] [Buy This Article]
5664-5666 : Growth of Pillarlike GaN Nanostructures
Satoshi Takeda, Kenei Ishino, Yoku Inoue, Akihiro Ishida, Hiroshi Fujiyasu, Hiroko Kominami, Hidenori Mimura, Yoichiro Nakanishi and Shingo Sakakibara
Published July 26, 2005
[Abstract] [Full Text PDF (152K)] [Buy This Article]
5667-5669 : Synthesis, Monolayer Formation, and Control of Electrical Characteristics of 3-nm-Diameter Gold Nanoparticles
Tadashi Arai, Shin-ichi Saito, Hiroshi Fukuda and Takahiro Onai
Published July 26, 2005
[Abstract] [Full Text PDF (187K)] [Buy This Article]
5670-5672 : Study on Energy Band of InGaN/GaN Self-Assembled Quantum Dots by Deep-Level Transient Spectroscopy
Eun Kyu Kim, Jin Soak Kim, Soon-Yong Kwon, Hee Jin Kim and Euijoon Yoon
Published July 26, 2005
[Abstract] [Full Text PDF (256K)] [Buy This Article]
5673-5676 : Porous Materials with Ultralow Optical Constants for Integrated Optical Device Applications
Hsuen-Li Chen, Chung-I Hsieh, Chao-Chia Cheng, Chia-Pin Chang, Wen-Hau Hsu, Way-Seen Wang and Po-Tsun Liu
Published July 26, 2005
[Abstract] [Full Text PDF (224K)] [Buy This Article]
5677-5679 : Control of InAs Quantum Dot Emission Wavelengths in Narrow Regions by Selective Formation of GaInAs Covered Layers Grown with in situ Mask
Shunsuke Ohkouchi, Yusui Nakamura, Hitoshi Nakamura and Kiyoshi Asakawa
Published July 26, 2005
[Abstract] [Full Text PDF (91K)] [Buy This Article]
5680-5682 : Atomistic Investigations of α-Fe Thin Film Growth on Al (100)
Chan-Yeup Chung and Yong-Chae Chung
Published July 26, 2005
[Abstract] [Full Text PDF (165K)] [Buy This Article]
5683-5686 : Transport Properties of Pt Nanowires Fabricated by Beam-Induced Deposition
Yosuke Tsukatani, Naoki Yamasaki, Katsuhisa Murakami, Fujio Wakaya and Mikio Takai
Published July 26, 2005
[Abstract] [Full Text PDF (461K)] [Buy This Article]
5687-5691 : Fabrication and Evaluation of Floating Gate Memories with Surface-Nitrided Si Nanocrystals
Shinya Naito, Tomonori Ueyama, Hiroki Kondo, Mitsuo Sakashita, Akira Sakai, Masaki Ogawa and Shigeaki Zaima
Published July 26, 2005
[Abstract] [Full Text PDF (342K)] [Buy This Article]
5692-5695 : Study of Chirped Quantum Dot Superluminescent Diodes
Il Ki Han, Hyung Cheol Bae, Woon Jo Cho, Jung Il Lee, Hong Lee Park, Tae Geun Kim and Joo In Lee
Published July 26, 2005
[Abstract] [Full Text PDF (135K)] [Buy This Article]
5696-5699 : Characteristics of Thermally Treated Quantum-Dot Infrared Photodetector
Sung Ho Hwang, Jae Cheol Shin, Jin Dong Song, Won Jun Choi, Jung Il Lee, Haewook Han and Seung-Woong Lee
Published July 26, 2005
[Abstract] [Full Text PDF (106K)] [Buy This Article]
5700-5702 : First-Principles Calculations of Atomistic Behaviors in Ni/Al (001) and Al/Ni (001) System
Chiho Kim and Yong-Chae Chung
Published July 26, 2005
[Abstract] [Full Text PDF (1030K)] [Buy This Article]
5703-5706 : Transport of Charge Carriers in HgTe/CdTe Core-Shell Nanoparticle Film
Hyunsuk Kim, Byoungjun Park, Kyoungah Cho, Jin-Hyoung Kim, Jun Woo Lee, Dong-Won Kim and Sangsig Kim
Published July 26, 2005
[Abstract] [Full Text PDF (261K)] [Buy This Article]

Bio MEMS and Lab on a Chip

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5707-5710 : A New Micro-Chemical Reactor Using Fluid Filters for Vertical Fluid Flow Operation
Yuichi Utsumi, Toshifumi Asano, Yoshiaki Ukita, Katsuhiro Matsui, Masahiro Takeo and Seiji Negoro
Published July 26, 2005
[Abstract] [Full Text PDF (229K)] [Buy This Article]
5711-5716 : Electrical Detection of Protein Using Gold Nanoparticles and Nanogap Electrodes
Chien-Ying Tsai, Tien-Li Chang, Ramesh Uppala, Chun-Chi Chen, Fu-Hsiang Ko and Ping-Hei Chen
Published July 26, 2005
[Abstract] [Full Text PDF (307K)] [Buy This Article]
5717-5723 : Biochip: Cellular Analysis by Atomic Force Microscopy Using Dielectrophoretic Manipulation
James Muys, M. M. Alkaisi, J. J. Evans and J. Nagase
Published July 26, 2005
[Abstract] [Full Text PDF (285K)] [Buy This Article]

Microsystem Technology and MEMS

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5724-5726 : Numerical Investigation of Defect Printability in Extreme Ultraviolet (EUV) Reflector: Ru/Mo/Si Multilayer System
In-Yong Kang, Jinho Ahn, Hye-Keun Oh and Yong-Chae Chung
Published July 26, 2005
[Abstract] [Full Text PDF (103K)] [Buy This Article]
5727-5731 : Fabrication of Nanomanipulator with SiO2/DLC Heterostructure by Focused-Ion-Beam Chemical Vapor Deposition
Reo Kometani, Takayuki Hoshino, Kazushige Kondo, Kazuhiro Kanda, Yuichi Haruyama, Takashi Kaito, Jun-ichi Fujita, Masahiko Ishida, Yukinori Ochiai and Shinji Matsui
Published July 26, 2005
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5732-5735 : Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures
Tomomi Sakata, Hiromu Ishii, Yuichi Okabe, Masao Nagase, Toshikazu Kamei, Kazuhisa Kudou, Masaki Yano and Katsuyuki Machida
Published July 26, 2005
[Abstract] [Full Text PDF (126K)] [Buy This Article]
5736-5739 : Study of IC Compatible On-Chip Thermoelectric Coolers
Seong-Ho Kong, Davey D. L. Wijngaards and Reinoud F. Wolffenbuttel
Published July 26, 2005
[Abstract] [Full Text PDF (189K)] [Buy This Article]
5740-5743 : Fabrication of HfC-Coated Si Field Emitter Arrays with Built-in Poly-Si Thin-Film Transistor
Masayoshi Nagao, Yutaka Sacho, Takashi Matsukawa, Seigo Kanemaru and Junji Itoh
Published July 26, 2005
[Abstract] [Full Text PDF (466K)] [Buy This Article]
5744-5748 : Fabrication of Micro Field Emitter Tip Using Ion-Beam Irradiation-Induced Self-Standing of Thin Films
Tomoya Yoshida, Akiyoshi Baba and Tanemasa Asano
Published July 26, 2005
[Abstract] [Full Text PDF (192K)] [Buy This Article]
5749-5754 : Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada and Tadashi Hattori
Published July 26, 2005
[Abstract] [Full Text PDF (238K)] [Buy This Article]
5755-5758 : Fabrication of Low-Frequency AC-DC Thermal Converter with Thermal Mass
Su-Lack Jung, Duk-Soo Eun, Do-Wook Kim, Seong-Ho Kong, Jung-Hee Lee, Jang-Kyoo Shin and Jong-Hyun Lee
Published July 26, 2005
[Abstract] [Full Text PDF (181K)] [Buy This Article]
5759-5763 : Fabrication of Micro Probe Beam Using MEMS Technology for New Vertical Silicon Probe Card
Young-Min Kim, Ho-Cheol Yoon, Chang-Taeg Seo and Jong-Hyun Lee
Published July 26, 2005
[Abstract] [Full Text PDF (356K)] [Buy This Article]
5764-5768 : Potential of Thermo-Sensitive Hydrogel as an Actuator
Jinseok Kim, Byungkyu Kim, Jaewook Ryu, Yongwon Jeong, Jungyul Park, Hyeon Cheol Kim and Kukjin Chun
Published July 26, 2005
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5769-5772 : Electrical Erasing of Holographic Grating in Amorphous Chalcogenide Thin Films
Choel-Ho Yeo, Ki-Nam Lee, Kyung Shin, Jong-Bin Kim and Hong-Bay Chung
Published July 26, 2005
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5773-5776 : Optical Micro-Manipulation Using Laguerre-Gaussian Beams
Valeria Garbin, Dan Cojoc, Enrico Ferrari, Remo Zaccaria Proietti, Stefano Cabrini and Enzo Di Fabrizio
Published July 26, 2005
[Abstract] [Full Text PDF (171K)] [Buy This Article]
5777-5780 : InAs Nano-Dot Array Formation Using Nano-Jet Probe for Photonics Applications
Shunsuke Ohkouchi, Yusui Nakamura, Hitoshi Nakamura and Kiyoshi Asakawa
Published July 26, 2005
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5781-5785 : Electrostatic Droplet Ejection Using Planar Needle Inkjet Head
Kazunori Hakiai, Yuji Ishida, Akiyoshi Baba and Tanemasa Asano
Published July 26, 2005
[Abstract] [Full Text PDF (234K)] [Buy This Article]
5786-5790 : Electrostatic Inkjet Patterning Using Si Needle Prepared by Anodization
Yuji Ishida, Kazunori Hakiai, Akiyoshi Baba and Tanemasa Asano
Published July 26, 2005
[Abstract] [Full Text PDF (193K)] [Buy This Article]

Etching and Deposition Technology

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5791-5794 : Fabrication of Silicon and Germanium Nanostructures by Combination of Hydrogen Plasma Dry Etching and VLS Mechanism
Ming-Che Yang, Jiann Shieh, Tsung-Shine Ko, Hsuen-Li Chen and Tieh-Chi Chu
Published July 26, 2005
[Abstract] [Full Text PDF (168K)] [Buy This Article]
5795-5798 : Impact of Tunnel Etching Process on Electrical Performances of SON Devices
V. Caubet, S. Borel, C. Arvet, J. Bilde, D. Chanemougame, S. Monfray, R. Ranica, P. Mazoyer and T. Skotnicki
Published July 26, 2005
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5799-5802 : Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids
Eiichi Kondoh
Published July 26, 2005
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5803-5806 : Resist Elution Study for Immersion Lithography
Mitsuru Sato, Masaaki Yoshida, Keita Ishizuka, Hiromitsu Tsuji and Kotaro Endo
Published July 26, 2005
[Abstract] [Full Text PDF (69K)] [Buy This Article]
5807-5810 : Nanostructure and Composition of Carbon/Silicon Graded Film Produced by Ionization-Assisted Deposition
Tsuyoshi Mano, Osamu Sugiyama, Hiroshi Nakayama, Yoshio Shibuya and Osamu Takai
Published July 26, 2005
[Abstract] [Full Text PDF (169K)] [Buy This Article]
5811-5818 : Dry Etching of TaN/HfO2 Gate Stack Structure by Cl2/SF6/Ar Inductively Coupled Plasma
Myoung Hun Shin, Sung-Woong Na, Nae-Eung Lee, Tae Kwan Oh, Jiyoung Kim, Taeho Lee and Jinho Ahn
Published July 26, 2005
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5819-5823 : Improved Etched Surface Morphology in Electron Cyclotron Resonance-Reactive Ion Etching of GaN by Cyclic Injection of CH4/H2/Ar and O2 with Constant Ar Flow
Taro Arakawa, Yoshiki Awa, Tomoyoshi Ide, Nobuo Haneji, Kunio Tada, Masakazu Sugiyama, Hiromasa Shimizu, Yukihiro Shimogaki and Yoshiaki Nakano
Published July 26, 2005
[Abstract] [Full Text PDF (140K)] [Buy This Article]

Nanomaterials, Resists and Processing

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5824-5828 : Outgassing Characteristics of Low-Molecular-Weight Resists for Extreme Ultraviolet Lithography
Hideo Hada, Taku Hirayama, Daiju Shiono, Junichi Onodera, Takeo Watanabe, Seung Yoon Lee and Hiroo Kinoshita
Published July 26, 2005
[Abstract] [Full Text PDF (368K)] [Buy This Article]
5829-5831 : Nanolithography Based on Photocatalysis of TiO2 Using an Atomic Force Microscope
Kenkichiro Kobayashi, Yasumasa Tomita and Yasuhiha Maeda
Published July 26, 2005
[Abstract] [Full Text PDF (199K)] [Buy This Article]
5832-5835 : Dependence of Acid Yield on Acid Generator in Chemically Amplified Resist for Post-Optical Lithography
Atsuro Nakano, Kazumasa Okamoto, Yukio Yamamoto, Takahiro Kozawa, Seiichi Tagawa, Toshiyuki Kai and Hiroaki Nemoto
Published July 26, 2005
[Abstract] [Full Text PDF (169K)] [Buy This Article]
5836-5838 : Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography
Hiroki Yamamoto, Takahiro Kozawa, Atsuro Nakano, Kazumasa Okamoto, Seiichi Tagawa, Tomoyuki Ando, Mitsuru Sato and Hiroji Komano
Published July 26, 2005
[Abstract] [Full Text PDF (70K)] [Buy This Article]
5839-5842 : Formation of Nanowires Based on π-Conjugated Polymers by High-Energy Ion Beam Irradiation
Satoshi Tsukuda, Shu Seki, Masaki Sugimoto and Seiichi Tagawa
Published July 26, 2005
[Abstract] [Full Text PDF (192K)] [Buy This Article]
5843-5846 : Photoluminescence Analysis of White-Light-Emitting Si Nanoparticles Using Effective Mass Approximation Method
Soojin Lee, Woon Jo Cho, Yang Do Kim, Eun Kyu Kim and Jae Gwan Park
Published July 26, 2005
[Abstract] [Full Text PDF (192K)] [Buy This Article]
5847-5850 : Gold Seed Arrangement on Nanoporous Anodic Aluminum Oxide Membrane by Centrifugal Force
Fengmin Chu, Miyoko Tanaka, Masayuki Shimojo, Kotaro Kajikawa and Kazuo Furuya
Published July 26, 2005
[Abstract] [Full Text PDF (187K)] [Buy This Article]
5851-5855 : Hybridization of Deoxyribonucleic Acid and Immobilization of Green Fluorescent Protein on Nanostructured Organosilane Templates
Takashi Tanii, Takumi Hosaka, Takeo Miyake, Yuzo Kanari, Guo-Jun Zhang, Takashi Funatsu and Iwao Ohdomari
Published July 26, 2005
[Abstract] [Full Text PDF (362K)] [Buy This Article]
5856-5865 : ArF Photoresist Deformation in Dual Frequency Superimposed Capacitively Coupled Plasma (DFS-CCP) with Different Frequency Combinations
Duck Ho Kim, Su Hyun Cho, Nae-Eung Lee and Ki Chung Kwon
Published July 26, 2005
[Abstract] [Full Text PDF (607K)] [Buy This Article]
5866-5870 : Development of Fast-Photospeed Chemically Amplified Resist in Extreme Ultraviolet Lithography
Takeo Watanabe, Hideo Hada, Seung Yoon Lee, Hiroo Kinoshita, Kazuhiro Hamamoto and Hiroshi Komano
Published July 26, 2005
[Abstract] [Full Text PDF (147K)] [Buy This Article]
5871-5874 : Formation and Electrooptic Characteristics of M-ttbPc LB Films
Tomoyuki Higo, Takashi Ikehara, Katusmi Irokawa and Masafumi Yamashita
Published July 26, 2005
[Abstract] [Full Text PDF (545K)] [Buy This Article]
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