Jpn. J. Appl. Phys. 35 (1996) pp. L126-L129  |Next Article|  |Table of Contents|
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Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask

Hideki Masuda and Masahiro Satoh

(Received August 9, 1995; accepted for publication November 27, 1995)

A highly ordered gold nanodot array was fabricated by vacuum evaporation using an anodic porous alumina membrane with through-holes of nanometer scale as a mask. This technique resulted in an orderly arrangement of Au dots with a diameter of approximately 40 nm over a large area on a Si substrate.

KEYWORDS: nanofabrication, nanodot array, anodic porous alumina, evaporation mask, gold
URL: http://jjap.ipap.jp/link?JJAP/35/L126/
DOI: 10.1143/JJAP.35.L126

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