Jpn. J. Appl. Phys. 36 (1997) pp. 3140-3145  |Next Article|  |Table of Contents|
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Magnification of Transportation Range Using Non-Contact Acoustic Levitation by Connecting Vibrating Plates

Yoshiki Hashimoto, Yoshikazu Koike¹ and Sadayuki Ueha¹

(Received October 24, 1996; accepted for publication January 31, 1997)

The authors have identified a new acoustic phenomenon by which an object weighing several kilograms and having a planar shape can be levitated by radiation pressure above a set of vibrating plates. We propose to use this phenomenon for levitation and transportation systems for moving silicon wafers and liquid crystal devices (LCDs). In this report, the authors describe a method that increases the capability of the device to carry large objects by placing two vibrating plates in parallel and enlarges the transportation range by placing the vibrating plates in a series. The results show that a large object such as an LCD 250 mm square can be transported long distances limited only by the number of plates placed in series.

KEYWORDS: acoustic levitation, radiation pressure, flexural vibration, traveling wave, standing wave, non-contact transportation, ultrasonic
URL: http://jjap.ipap.jp/link?JJAP/36/3140/
DOI: 10.1143/JJAP.36.3140

References | Citing Articles (7)

1. Yoshiki Hashimoto, Yoshikazu Koike and Sadayuki Ueha: J. Acoust. Soc. Jpn. (E) 16 (1995) 3.
2. Yoshiki Hashimoto, Yoshikazu Koike and Sadayuki Ueha: to be published in J. Acoust. Soc. Am.
3. Yoshiki Hashimoto, Yoshikazu Koike and Sadayuki Ueha: submitted to J. Acoust. Soc. Am.