Jpn. J. Appl. Phys. 42 (2003) pp. 1090-1094  |Next Article|  |Table of Contents|
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Consideration and Control of Writing Conditions with Near-Field Aperture Solid Immersion Lens Probe

Shu-Guo Tang and Tom D. Milster

(Received August 12, 2002; accepted for publication October 15, 2002)

Control of writing conditions for near-field aperture-SIL (APSIL) probe is investigated with respect to polarization, axial focus position of the objective lens and beam transverse misalignment. Both FDTD simulations and edge-scan experiments are used in the investigation. The TE direction is the optimal writing polarization direction, and the probe exit plane is the optimum focus position of the illuminating lens. Spot size change and spot position shift relative to the center of the probe are observed with TE polarization when the writing beam is transversely misaligned.

KEYWORDS: near-field aperture SIL probe, optical data storage, polarization, axial focus position, beam transverse alignment, spot profile
URL: http://jjap.ipap.jp/link?JJAP/42/1090/
DOI: 10.1143/JJAP.42.1090

References | Citing Articles (2)

1. S. M. Mansfield and G. S. Kino: Appl. Phys. Lett. 57 (1990) 2615[AIP Scitation].
2. R. Wolfe, E. M. Gyorgy, P. L. Finn, M. H. Kryder, E. Betzig, J. K. Trautman and C.-H. Chang: Appl. Phys. Lett. 61 (1992) 142[AIP Scitation].
3. T. D. Milster, F. Akhavan, M. Bailey, J. K. Erwin, D. M. Felix, K. Hirota, S. Koester, K. Shimura and Y. Zhang: Jpn. J. Appl. Phys. 40 (2001) 1778[IPAP].
4. S.-G. Tang, T. D. Milster, J. K. Erwin and W. L. Bletscher: Opt. Lett. 26 (2001) 1987.
5. K. Hirota, Y. Zhang, T. D. Milster and J. K. Erwin: Jpn. J. Appl. Phys. 39 (2000) 973[IPAP].
6. J. Jo and T. D. Milster: Proc. SPIE. 4342 (2001) 312[AIP Scitation].