Jpn. J. Appl. Phys. 43 (2004) pp. L950-L953 |Previous Article| |Table of Contents|
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Letter
Position-Selected Molecular Ruler
Hirofumi Tanaka,
Mary E. Anderson,
Mark W. Horn1 and
Paul S. Weiss
Departments of Chemistry and Physics, The Pennsylvania State University, 104 Davey Laboratory, University Park, PA 16802, U.S.A.
1Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA 16802, U.S.A.
(Received April 5, 2004; accepted May 7, 2004; published June 25, 2004)
The molecular ruler method allows the precise control of the gap between a parent gold structure and a deposited daughter structure using a conveniently grown self-assembled molecular multilayer as a lithographic mask. However, we cannot choose a position where the gap should be placed, since the ruler attaches to all exposed gold surfaces. In this work, a convenient method of selecting the position of nanogaps by further patterning the molecular multilayer using low-energy electron beam irradiation and piranha etchant is described.
KEYWORDS:
molecular ruler, self-assembled monolayer, mercaptohexadecanoic acid, position select, electron irradiation, bottom up nanotechnology
URL:
http://jjap.ipap.jp/link?JJAP/43/L950/
DOI: 10.1143/JJAP.43.L950
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