Jpn. J. Appl. Phys. 44 (2005) pp. 3385-3387  |Previous Article| |Next Article|  |Table of Contents|
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Fabrication and Characterization of Sub-100 µm Diameter Gallium Phosphide Solid Immersion Lens Arrays

Matthew Lang, Tom D. Milster, Takahisa Minamitani¹, Gregg Borek¹ and David Brown¹

(Received November 22, 2004; accepted February 25, 2005; published May 24, 2005)

Fabrication and testing of a sub-100 µm gallium phosphide solid immersion lens is described with suitable sphericity (<160 nm deviation) to a marginal ray angle of 42° for NA up to 2.2 inside the material.

KEYWORDS: solid immersion lens, lithography, gallium phosphide, phase-shifting interferometry
URL: http://jjap.ipap.jp/link?JJAP/44/3385/
DOI: 10.1143/JJAP.44.3385

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