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Jpn. J. Appl. Phys. 44 (2005) pp. L1228-L1230  |Previous Article| |Next Article|  |Table of Contents|
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Letter

Mechanical Characteristics of Diamond-Like-Carbon Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

Ken-ichiro Nakamatsu^1,2, Masao Nagase³, Hideo Namatsu³ and Shinji Matsui^1,2

¹University of Hyogo, Graduate School of Science, Lasti, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
²CREST-JST, Kawaguchi Center Building, 4-1-8, Honcho, Kawaguchi, Saitama 332-0012, Japan
³NTT Basic Research Laboratories, NTT Corp., Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan

(Received July 6, 2005; accepted August 6, 2005; published September 16, 2005)

Our investigation of diamond-like-carbon (DLC) nanosprings with a 130-nm spring section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings with in-situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of the DLC nanosprings on the spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of the measured spring constant was accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel.

KEYWORDS: nanospring, diamond-like-carbon, focused-ion-beam, chemical vapor deposition, mechanical characteristics
URL: http://jjap.ipap.jp/link?JJAP/44/L1228/
DOI: 10.1143/JJAP.44.L1228

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References | Citing Article (1)

1. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda and Y. Haruyama: J. Vac. Sci. Technol. B 18 (2000) 3181[AIP Scitation].
2. R. Kometani, T. Morita, K. Watanabe, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida, Y. Ochiai and S. Matsui: Jpn. J. Appl. Phys. 42 (2003) 4107[IPAP].
3. T. Morita, R. Kometani, K. Watanabe, K. Kanda, Y. Haruyama, T. Hoshino, K. Kondo, T. Kaito, T. Ichihashi, J. Fujita, M. Ishida, Y. Ochiai and S. Matsui: J. Vac. Sci. Technol. B 21 (2003) 2737[AIP Scitation].
4. R. Kometani, T. Hoshino, K. Kondo, K. Kanda, Y. Haruyama, T. Kaito, J. Fujita, M. Ishida and S. Matsui: Jpn. J. Appl. Phys. 43 (2004) 7187[IPAP].
5. M. Nagase, K. Nakamatsu, S. Matsui and H. Namatsu: Jpn. J. Appl. Phys. 44 (2005) 5409[IPAP].
6. J. Fujita, M. Ishida, T. Sakamoto, Y. Ochiai, T. Kaito and S. Matsui: J. Vac. Sci. Technol. B 19 (2001) 2834[AIP Scitation].
7. D.-L. Liu, D.-X. Ye, F. Khan, F. Tang, B.-K. Lim, R. C. Picu, G.-C. Wang and T.-M. Lu: J. Nanosci. Nanotechnol. 3 (2003) 492.
8. G. Zhang and Y. Zhao: J. Appl. Phys. 95 (2003) 267[AIP Scitation].
9. J. P. Singh, D.-L. Liu, D.-X. Ye, R. C. Picu, T.-M. Lu and G.-C. Wang: Appl. Phys. Lett. 84 (2003) 3657[AIP Scitation].
10. C. J. Ancker and J. N. Goodier: J. Appl. Mech. 25 (1958) 466.

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