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Jpn. J. Appl. Phys. 45 (2006) pp. L602-L604  |Previous Article| |Next Article|  |Table of Contents|
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Letter

Limitations in Through-Focus Depth Sectioning in Non-Aberration Corrected High-Angle Annular Dark-Field Imaging

Dmitri O. Klenov and Susanne Stemmer

Materials Department, University of California, Santa Barbara, CA 93106-5050, U.S.A.

(Received March 26, 2006; revised May 7, 2006; accepted May 11, 2006; published online June 9, 2006)

The focus dependence of atom column intensities in high-angle annular dark-field (HAADF) images is investigated as a function of sample thickness for two different materials, InP and SrTiO₃. We show that even for very thick samples, the column intensities in both materials are maximized if the probe is focused near the entrance sample surface. Atom column intensities decrease for focus settings away from the optimum focus. The results show that HAADF through-focus series with a non-aberration corrected probe do not allow for atomically resolved depth sectioning in zone-axis crystals.

KEYWORDS: scanning transmission electron microscopy, high-angle annular dark-field imaging, InP, SrTiO₃, electron tomography
URL: http://jjap.ipap.jp/link?JJAP/45/L602/
DOI: 10.1143/JJAP.45.L602

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