Jpn. J. Appl. Phys. 46 (2007) pp. 3724-3728  |Previous Article| |Next Article|  |Table of Contents|
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Optical Design for the Optimum Solid Immersion Lens with High Numerical Aperture and Large Tolerance

Narak Choi, Seongbo Shim, Tom D. Milster¹, and Jaisoon Kim

(Received November 20, 2006; accepted January 23, 2007; published online June 22, 2007)

Super hemispherical solid immersion lens system becomes a matter of interest due to its high numerical aperture (NA) gain. However, because of the instability of the aplanatic condition, even small amount of alignment error can easily lower the optical performance. To overcome the instability while maintaining high NA gain, we suggest an optimum solid immersion lens (opti-SIL) system which combines the advantages of both super hemispherical SIL (hyper-SIL) and hemispherical SIL (hemi-SIL). Exemplary designs and simulation results of the tolerance analysis show that opti-SIL system has much higher tolerances to various performance-lowering factors than hyper-SIL, even with relatively small NA resignation.

KEYWORDS: opti-SIL, hyper-SIL, hemi-SIL, tolerance, NA gain, near field recording
URL: http://jjap.ipap.jp/link?JJAP/46/3724/
DOI: 10.1143/JJAP.46.3724

References

1. B. D. Terris, H. J. Mamin, and D. Rugar: Appl. Phys. Lett. 68 (1996) 141[AIP Scitation].
2. I. Ichimura, S. Hayashi, and G. S. Kino: Appl. Opt. 36 (1997) 4339.
3. T. D. Milster, R. S. Upton, and H. Luo: Opt. Eng. 38 (1999) 295[AIP Scitation].
4. T. S. Song, H. D. Kwon, Y. J. Yoon, K. S. Jung, N. C. Park, and Y. P. Park: Jpn. J. Appl. Phys. 42 (2003) 1082[IPAP].
5. W. Kim, H. Choi, T. S. N. Park, and Y. Park: Jpn. J. Appl. Phys. 45 (2006) 1351[IPAP].
6. L. Minyu, X. Baoxi, C. T. Chong, Y. Gaoqiang, and B. C. Yang: Jpn. J. Appl. Phys. 39 (2000) 875[IPAP].
7. Y. Zhang, T. D. Milster, J. Kim, and S. Park: Jpn. J. Appl. Phys. 43 (2004) 4929[IPAP].
8. R. Kingslake: Lens Design Fundamentals (Academic Press, New York, 1978) p. 101.
9. F. A. Jenkins and H. E. White: Fundamentals of Optics (McGraw-Hill, New York, 1965) 4th ed., p. 166.
10. X. Baoxi, C. T. Choung, L. Minyu, V. Boopathi, and Y. Gaoqiang: Proc. SPIE 3401 (1999) 40[AIP Scitation].
11. J. S. Jo and T. D. Milster: Proc. SPIE 4342 (2001) 312[AIP Scitation].
12. T. D. Milster: Conf. Dig. Optical Data Storage Top. Meet., 1997, p. 60.
13. M. Born and E. Wolf: Principles of Optics (Cambridge University Press, London, 1999) 7th ed., p. 443.
14. B. Richards and E. Wolf: Proc. R. Soc. London, Ser. A 253 (1959) 358.