Jpn. J. Appl. Phys. 46 (2007) pp. 3737-3740  |Previous Article| |Next Article|  |Table of Contents|
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Investigation of Micro Solid Immersion Lens Mounting Systems

Matthew Lang, Tom D. Milster, Takahisa Minamitani¹, and Gregg Borek¹

(Received November 24, 2006; accepted January 23, 2007; published online June 22, 2007)

Concept, design and analysis of several solid immersion lens (SIL) mounting systems utilizing high-index refractive micro SILs are described. This paper proposes several designs for wafer-scale SIL assemblies capable of a numerical aperture of 2.2.

KEYWORDS: solid immersion lens, lithography, gallium phosphide, micro-optics
URL: http://jjap.ipap.jp/link?JJAP/46/3737/
DOI: 10.1143/JJAP.46.3737

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