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Jpn. J. Appl. Phys. 46 (2007) pp. L568-L570  |Previous Article| |Next Article|  |Table of Contents|
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Letter

Achieving 63 pm Resolution in Scanning Transmission Electron Microscope with Spherical Aberration Corrector

Hidetaka Sawada^1,2, Fumio Hosokawa^1,2, Toshikatsu Kaneyama^1,2, Toshihiro Ishizawa², Mitsuhisa Terao², Muneyuki Kawazoe², Takumi Sannomiya^1,2, Takeshi Tomita^1,2, Yukihito Kondo^1,2, Takayuki Tanaka^1,3, Yoshifumi Oshima^1,3, Yasumasa Tanishiro^1,3, Naoki Yamamoto^1,3, and Kunio Takayanagi^1,3

¹CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
²JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
³Tokyo Institute of Technology, 2-12-1 Oh-okayama, Meguro-ku, Tokyo 152-8551, Japan

(Received March 22, 2007; revised April 18, 2007; accepted April 25, 2007; published online June 8, 2007)

The performance of a newly developed high-resolution 300 kV microscope equipped with a spherical aberration corrector for probe-forming systems is reported. This microscope gave the highest resolution for the distance between atomic columns, as determined by a high-angle annular dark field imaging method using a GaN[211] crystalline specimen, where the distance between the neighboring columns of Ga was 63 pm.

KEYWORDS: aberration correction, electron microscope, high resolution, dark field image
URL: http://jjap.ipap.jp/link?JJAP/46/L568/
DOI: 10.1143/JJAP.46.L568

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