Jpn. J. Appl. Phys. 47 (2008) pp. 5116-5119  |Previous Article| |Next Article|  |Table of Contents|
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Height Dependence of Young's Modulus for Carbon Nanopillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition

Keiichiro Nonaka^1,2, Kojiro Tamaru^1,2, Masao Nagase¹, Hiroshi Yamaguchi¹, Shin'ichi Warisawa², and Sunao Ishihara²

(Received November 7, 2007; revised February 13, 2008; accepted March 28, 2008; published online June 20, 2008)

We investigated the height dependence of the Young's modulus for carbon nanopillars grown by focused-ion-beam-induced chemical vapor deposition (FIB-CVD) using phenanthrene gas as a source material. Carbon nanopillars of different heights were grown by FIB-CVD at various growth times and a fixed ion-beam focal point. The growth heights ranged from 3.6 to 35.6 µm. The diameters at the bottoms of the pillars were nearly the same, 100 nm, and it increased as the growth progressed. Young's modulus of the carbon nanopillars was evaluated from resonant frequency for mechanical vibration using uniform and nonuniform models. Young's moduli differed for different growth heights for both of the models.

KEYWORDS: focused-ion-beam-induced chemical vapor deposition, carbon nanopillar, focal point, Young's modulus, growth rate, resonance characteristic, scanning electron microscope
URL: http://jjap.ipap.jp/link?JJAP/47/5116/
DOI: 10.1143/JJAP.47.5116

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