Jpn. J. Appl. Phys. 48 (2009) 06FG07 (5 pages)  |Previous Article| |Next Article|  |Table of Contents|
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Evaluation of Thermal–Mechanical Vibration Amplitude and Mechanical Properties of Carbon Nanopillars Using Scanning Electron Microscopy

Keiichiro Nonaka^1,2, Kojiro Tamaru^1,2, Masao Nagase¹, Hiroshi Yamaguchi¹, Shin'ichi Warisawa², and Sunao Ishihara²

(Received November 28, 2008; accepted February 6, 2009; published online June 22, 2009)

We describe a method for evaluating thermal–mechanical vibration amplitude by means of analysis of scanning electron microscopy images. The samples used were carbon nanopillars of different heights grown by focused-ion-beam-induced chemical vapor deposition. The secondary electron yield profile of carbon nanopillars excited by thermal noise is modeled, and vibration amplitude is determined by fitting the modeled profile to the experimental profile. The Young's modulus of carbon nanopillars is deduced from the determined amplitude. Furthermore, the density of carbon nanopillars is estimated from the deduced Young's modulus and the measured resonant frequency. The obtained Young's moduli and densities range from 51 to 78 GPa and from 2500 to 3500 kg/m³, respectively.

URL: http://jjap.ipap.jp/link?JJAP/48/06FG07/
DOI: 10.1143/JJAP.48.06FG07

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